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IC Bumping Mask 規格
1、Mask size
| Quartz | Soda Lime |
| 3"×5" | 9012(228.6×228.6×3.0) |
| 5009 | 14"×14"×3.0/4.8 |
| 6025 | |
| 7012 | |
| 9012 |
2、Quartz Mask Specification (Unit: um)
| Grade | C | B | A |
| Min Pattern | 1.5 | 2.5 | 3 |
| CD | ±0.1 | ±0.15 | ±0.25 |
| Total Pitch | ±0.2 | ±0.2 | ±0.25 |
| Defect | <2 | <2 | <2 |
3、Soda Lime Mask Specification (Unit: um)
| Grade | C | B | A |
| Min Pattern | 3 | 3 | 5 |
| CD | ±0.25 | ±0.3 | ±0.5 |
| Total Pitch | ±0.5 | ±0.5 | ±0.5 |
| Defect | <5.0 | <5.0 | <5.0 |